stp maglev pumps

Extremely Reliable
5-Axis Full Maglev
Extremely Robust
10 Years



The integrated controller series can be fully interfaced with advanced controllers to operate on a wide range of applications and processes. It eliminates the need for a conventional, rack-mounted controller and interconnecting cables. The fully integrated product offers easy installation and small footprint as an all-in-one solution for all application tools.
Edwards STP sizes
iX455 | iXR1606 | iXR1606 | iXR2206 | iXR2206 | iXA2206A | iXA3306C | iXA3306C | iXA4506C | ||
Inlet flange* ISO | 100K/160K | 160F | 200F/250F | 200F | 250F | 250F | 250F | 320F | 320F | |
Inlet flange* ICF | - | 203 | 253/305 | 253 | 305 | 305 | 305 | 356 | - | |
Pumping Speed N2 | l/s | 300/450 | 1000 | 1600 | 1850 | 2200 | 2200 | 2650 | 3200 | 4000 |
Pumping Speed H2 | l/s | 300/460 | 800/ | 1200 | 1250 | 1350 | 1700 | 2050 | 2300 | 2700 |
Pumping Speed Ar | l/s | - | - | - | 1650 | 2000 | 1900 | 2300 | 2800 | 3400 |
Compression ratio N2 | >108 |
>108 |
>108 |
>108 |
>108 |
>108 |
>108 |
>108 |
>108 |
|
Compression ratio H2 | >1x104 |
>1x104 |
>1x103 |
>1x103 |
>1x103 |
>1x104 |
2x103 |
2x103 |
2x103 |
|
Ultimate pressure | Pa | 6.5x10-6 |
6.5x10-6 |
10-7 |
10-7 |
10-7 |
10-7 |
10-7 |
10-7 |
10-7 |
The multistage pure bladed rotors in the UHV pumps provide the high vacuums required for clear beamlines on CD SEM machines, mass spectrometers and ion implanters. They provide optimum pumping performance with excellent light gas compression ratios.
STP301 | STP451 | STP603 | STP1003 | ||
Inlet flange | ISO100 / ICF152 | ISO160 / ICF203 | ISO160 | ISO200 | |
Pumping speed N2 | l/s | 300 | 480 | 650 | 1000 |
Pumping speed H2 | l/s | 300 | 460 | 550 | 800 |
Compression ratio N2 | >108 |
>108 |
>108 |
>108 |
|
Compression ratio He | 5x105 |
5x105 |
- | - | |
Compression ratio H2 | 2x104 |
2x104 |
>105 |
>105 |
|
Ultimate Pressure with bake out heating ISO flange | Pa | 6.5x10-6 |
6.5x10-6 |
6.5x10-6 |
10-6 |
Ultimate Pressure with bake out heating ICF flange | Pa | 10-8 |
- | - |
The multi-axis magnetic bearing system is used to suspend the rotor during operation, ensuring there is no risk of contamination while minimising vibration, noise and maintenance requirements.
The STP pumps can be fully interfaced with advanced controllers to operate on a wide range of applications and processes. They offer class leading pumping performance demonstrating exceptional levels of reliability, and are widely accepted in the market with the installed base of over 140,000 units worldwide.They are the preferred choice for many of the most challenging semiconductor applications. For laboratory applications this makes STP maglev turbomolecular pumps extremely reliable.
Product Features
OIL FREE
ensures clean vacuum, low power and low vibration. the use of magnetic bearings eliminates all hydrocarbon lubricants.VIBRATION FREE
magnetic levitation means no friction and thus extremely low vibration, in addition this remains constant and does not change as parts wear.MAINTENANCE FREE
zero friction means no wear and thus no routine maintenance is required in normal operation.AUTOMATIC BALANCING SYSTEM
Edwards 5-axis pumps are able adjust the magnetic field dynamically to take out rotor imbalances.CORROSION RESISTANCE
most models of Edwards STP maglev turbomolecular pumps are also available in a special corrosion resistant version with nickel coated rotors and a nitrogen purge facility, making them ideal for chemical laboratory applications.