ixh Dry Pump

Modular design with a wide range of pump sizes
More process capability
Greatly increased powder handling capability
and innovative Gas Buster™ technology
'Plug and Pump'
Integral controller and safety systems for flexible operation. Low installation costs.
No routine maintenance
No preventive maintenance between major overhauls
The iXH dry pump range is an evolution of our market leading iH, and sets new standards for harsh process capability, reliability and lower cost of ownership. iXH pumps offer greatly increased dust and powder handling capabilities.
iXH sizes
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iXH100 | iXH610 | iXH1210 | ||
Peak pumping speed | m³/h | 100 | 665 | 1025 |
Ultimate pressure | mbar | 0.02 | 0.005 | 0.005 |
Power at ultimate | kW | 2.1 | 2.6 | 3.2 |
Power in Green Mode | kW | 0.045 | 0.045 | 0.045 |
Noise at ultimate | dB(A) | 63 | 64 | 64 |
iXH sets new standards for really harsh process capabilities, reliability, and low cost of ownership. iXH pumps offer greatly increased dust and powder handling capabilities.
A wide pump temperature range allows optimisation to minimise by-product accumulation from condensation and plating reactions. iXH is available as primary pump at 100 m³/h (the iXH100) or combined with inverter-driven boosters delivering peak speeds of 665 m³/h (iXH610) or 1025 m³/h (iXH1210).
Product Features
PERFORMANCE
High capacity dry pumps and boosters give an expanded process window to enhance yieldsHYDROGEN PUMPING
Greatly increased hydrogen pumping speed for advanced EPI and solar processesZERO MAINTENANCE
Zero maintenance between overhauls and low cost of ownershipENERGY EFFICIENT
Low power consumption plus Green Mode plus no routine maintenance, for low cost of ownershipTEMPERATURE CONTROL
Wide temperature range allows optimisation of pump to minimise by-product accumulation from condensation and platingPOWDER HANDLING
Greatly increased powder handling capability and innovati ve Gas Buster™ (1) technology