ixM Dry Pump
iXM is the future, the future is now.
Modular design with a wide range of pump sizes
More process capability
Greatly increased powder handling capability
and innovative Gas Buster™ technology
'Plug and Pump'
Integral controller and safety systems for flexible operation. Low installation costs.
No routine maintenance
No preventive maintenance between major overhauls
Edwards iXM series, the new global benchmark in vacuum innovation, are the low energydry pumps that bring real process improvements and cost benefits to the most critical of applications.
iXM sizes
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| iXM200 | iXM600 | iXM1210 | iXH1800 | ||
| Peak pumping speed (1) | m³/h | 200 | 600 | 1030 | 1720 |
| Ultimate pressure (1) | mbar | 0.01 | 0.005 | 0.005 | 0.003 |
| Power at ultimate (2) | kW | 0.8 | 1.1 | 1.3 | 2.3 |
| Power in Green Mode | kW | 0.202 | 0.202 | 0.202 | 0.351 |
| Noise at ultimate (1) | dB(A) | 63 | 57 | 57 | 63 |
iXM is a new range of dry pumps built for green manufacturing; the energy efficient roots mechanism has been developed to dramatically reduce input power to 1.3 kW, 60% lower than the previous generation of dry pump, reducing environmental impact and lowering cost of ownership. Gas barrier technology and thermal design improvements enable four times greater corrosion resistance than iH Series product. Advanced powder handling features mean iXMwill deliver maximum reliability and extended pump life for multi-layer etch processes and reduced power consumption for CVD processes. Its compact and light-weight design, combined with exceptionally low noise and vibration, makes iXM the most versatile dry pump in the Edwards range. iXM will transform your expectations of dry vacuum pump technology, deliver real benefits and increased uptime, with minimal environmental impact.
Product Applications
LOW POWER
•Exceptionally low power input at only 1.3 kW
for 1200 class pump
•Up to 60% less power compared to alternative
dry pumps(1)
•Green Mode enabled for power and nitrogen
savings while idle
INCREASED LIFESPAN
•4x lower corrosion rate compared to previous
generation product
•Exceptional powder handling
•30% increased starting torque compared to
iGX pumps.
REDUCED ENVIRONMENTAL IMPACT
•Whisper quiet at only 58 dB(A)
•34% smaller footprint compared to alternative
dry pumps
DOCUMENTATION & VIDEOS
