ixL Dry Pump
Hermetically Sealed, innovative mechanism
0.013 / 0.001 MBAR
Superior vacuum levels achieved
'Plug and Pump'
Integral controller and safety systems for flexible operation. Low installation costs.
<55DB(A)
Smooth, low noise and vibration operation
No routine maintenance
Oil lubricated precision bearings with no routine maintenance
The iXL is the most compact and low energy dry pump option. It provides repeatable fast pump down of small load lock chambers and clean process operations with extremely low power consumption.
iXL sizes
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| iXL120 | iXL1000N | ||
| Peak pumping speed | m³/h | 110 | 930 |
| Ultimate pressure | mbar | 0.013 | 0.001 |
| Power at ultimate | kW | 0.55 | 1 |
| Power in Green Mode | kW | 0.045 | 0.05 |
| Noise at ultimate | dB(A) | <55 | <5 |
The iXL is available as the iXL120N stand-alone unit, or as the iXL1000N combination, which includes an inverter-driven booster delivering 930 m³/h peak pumping speed.
iXL120 is one of the smallest and lightest pumps available for load lock and clean applications. It’s low vibration and low noise levels make it ideal for mounting on-tool or within a fab’s waffle floor, helping to save valuable floor space. A Green Mode allows reduced utilities usage during idle periods, lowering utility costs and helping to save the environment!
Product Features
LOW POWER
Only 0.55kW* power consuption helps minimise customers cost of ownershipSMOOTH RUNNING
Oil lubricated precision bearings ensure smooth, low vibration operation with no routine maintenanceZERO PURGE OPTION
Zero nitrogen purge option eliminates the need for a nitrogen supply, saving installation and operating costsGREEN MODE
Green Mode can reduce power consumption by up to 92% during idle periodsCOMPACT
iXL120 is extremely small and light, saving valuable spaceUNIQUE PERFORMANCE
Class leading chamber pump down time reduces total average cycle time (TACT)
DOCUMENTATION & VIDEOS
iXL 120 datasheet
iXL low energy dry pumps
