mDS3 and mXD3s dry scroll vacuumpumps
Edwards range of small dry scroll pumps is expanding with the introduction of the compact mXDS3 and mXDS3s.

DRY PUMP
no oil to check, replace and dispose of making this pump more environmentally friendly.
COMPACT
at only 8kg it is well suited for integration into OEM and analytical instruments, small system builder and laboratories.
QUIET OPERATION
with low noise level, it makes for a better-quality working environment.
LOW MAINTENANCE
tip seal change when required (typically 2 years)
S-VERSION
mXDS3s comes factory fitted with an inlet valve featuring delay opening. It is also supplied with an exhaust silencer. Both offer the same vacuum performance and feature an IEC connector for main supply and an on/off switch for easy control.
New Compact Dry Scroll Pumps
Edwards' range of small dry scroll pumps is expanding with the introduction of the compact mXDS3 and mXDS3s.
The new mXDS3 dry scroll pump delivers a 3 m³/h pumping speed with an ultimate pressure of 0.1 mbar, making it ideal for backing turbomolecular pumps. The mXDS3 is the standard option, supplied without an inlet valve.
The mXDS3s comes factory-fitted with an inlet valve featuring delay opening and includes an exhaust silencer. Both models offer the same vacuum performance and feature an IEC connector for the main supply and an on/off switch for easy control.
This compact dry pump offers flexibility for system designers and end users alike, with a wide range of accessories available to meet your configuration requirements.
mXDS pump sizes
![]() |
||
mXDS3 | ||
Peak pumping speed | m³/h | 3 |
Ultimate vacuum (total pressure) | mbar | 0.1 |
Ultimate vacuum with gas ballast (1 turn ) | mbar | 0.15 |
Max inlet pressure | mbar | 1000 |
Noise at ultimate | dBA | 54 |
Overall dimensions (LxWxH) | mm | 224x158x231 |
- No oil
- No membrane
- 5 years between major service