Edwards BGV gate valves are bellows sealed stainless steel gate valves for use in applications which require high leak tightness and a minimum of hydrocarbons in the vacuum system. Although principally designed for the isolation of pumps in the semiconductor fab basement, BGV gate valves are also ideal in other applications where a 1 bar differential at opening is desirable.
They are designed for use in the pressure range of 1.2 bar absolute to 1 x 10⁻⁸ mbar (1.2 x 10⁵ to 1x10⁻⁶ Pa). BGV gate valves will withstand 1.2 bar absolute in either direction allowing the vacuum line above the pump to be vented with the valve closed.
The BGV Mk2 pneumatic variant has reed switches which can be used by your control equipment to determine if the valve is open or closed, these also contain LEDs providing a visual display of the valve position. Each BGV Mk2 pneumatic valve is fitted with a 24 V a.c./d.c. solenoid and pre-wired plug for direct connection to your Edwards latest generation vacuum pump. This 15-way “D” plug offers a single point of connection for both power to the solenoid and the signal from the reed switch position indicators.
In order to connect the BGV Mk2 pneumatic valve to Edwards legacy products the BGV Mk2 TIM interface cable should be used. Lock Out Tag Out (LOTO) versions are also available.
Avoids re-start issues by keeping the pump running during maintenance
Long service life and reliability in harsh environments.
Minimises damage due to particulates in dusty processes.
Leak rate (body / Valve seat)
Pressure range
Max Operating temperature (valve body)
Cycles until first service
Available with
mbar l/s
°C
BGV Mk2
<1x10-9 / <1x10-7
1x10-8 mbar to 1.2 bar
150
5000
NW50, ISO63, ISO80, ISO100, ISO160
BGV LOTO
<1x10-9 / <1x10-7
1x10-9 mbar to 1.2 bar
120
20000
NW50, ISO63, ISO80, ISO100, ISO160
Spectroscopy magazine